Extended Si ˆ311‰ defects

نویسندگان

  • Jeongnim Kim
  • John W. Wilkins
  • Furrukh S. Khan
  • Andrew Canning
چکیده

We perform total-energy calculations based on the tight-binding Hamiltonian scheme ~i! to study the structural properties and energetics of the extended $311% defects depending upon their dimensions and interstitial concentrations and ~ii! to find possible mechanisms of interstitial capture by and release from the $311% defects. The generalized orbital-based linear-scaling method implemented on the Cray T3D is used for supercell calculations of large-scale systems containing more than 1000 Si atoms. We investigate the $311% defects systematically from few-interstitial clusters to planar defects. For a given defect configuration, constanttemperature molecular-dynamics simulations are performed at 300–600 K for about 1 psec to avoid trapping in the local minima of the atomic structures with small energy barriers. We find that interstitial chain structures along the ^011& direction are stable interstitial defects with respect to isolated interstitials. The interstitial chains provide basic building blocks of the extended $311% defects, i.e., the extended $311% defects are formed by condensation of the interstitial chains side by side in the ^233& direction. We find that successive rotations of pairs of atoms in the $011% plane are mechanisms with a relatively small energy barrier for propagation of interstitial chains. These mechanisms, together with the interstitial chain structure, can explain the growth of the $311% defects and related structures such as V-shape bend structures and atomic steps observed in transmission electron microscopy images. @S0163-1829~97!03123-8#

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Annealing kinetics of ˆ311‰ defects and dislocation loops in the end-of-range damage region of ion implanted silicon

The evolution of both $311% defects and dislocation loops in the end-of-range ~EOR! damage region in silicon amorphized by ion implantation was studied by ex situ transmission electron microscopy ~TEM!. The amorphization of a ~100! n-type Czochralski wafer was achieved with a 20 keV 1310/cm Si ion implantation. The post-implantation anneals were performed in a furnace at 750 °C for times rangin...

متن کامل

Modeling extended defect „ˆ311‰ and dislocation... nucleation and evolution in silicon

End of range ~EOR! defects are the most commonly observed defects in ultrashallow junction devices. They nucleate at the amorphous-crystalline interface upon annealing after amorphization due to ion implantation. EOR defects range from small interstitial clusters of a few atoms to $311% defects and dislocation loops. They are extrinsic defects and evolve during annealing. Li and Jones @Appl. Ph...

متن کامل

A combined model for ˆ311‰ defect and dislocation loop evolution: Analytical formulation of kinetic precipitation model

Accurate modeling of extended defect kinetics is of primary importance for prediction of transient enhanced diffusion ~TED! following ion implantation of silicon. Our previously developed moment-based model @Gencer and Dunham, J. Appl. Phys. 81, 631 ~1997!# accurately accounts for formation and evolution of $311% defects and can be used to predict TED under subamorphizing conditions. Using expe...

متن کامل

Extended Defects Formation in Si Crystals by Clustering of Intrinsic Point Defects Studied by in-situ Electron Irradiation in an HREM

In situ irradiation experiments in a high resolution electron microscope JEOL-4000EX at room temperature resulted in discovery of the isolated and combined clustering of vacancies and selfinterstitial atoms on {111}and {113}-habit planes both leading to an extended defect formation in Si crystals. The type of the defect is strongly affected by the type of supersaturation of point defects depend...

متن کامل

The Origin and Properties of New Extended Defects Revealed by Etching in Plastically Deformed Si and SiGe

The experimental results are presented of a study of new extended defects morphology in Si. It is shown that the defects generated by moving 60 -dislocation lie in the dislocation slip plane. h110i and h112i axes of the defects are found and {113} and {115} habit planes are supposed. It is assumed that the peculiarities of the atomic structure of split 60 -dislocations are the source of local s...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 1997